Facility
Reactor Types
Technology
Metrology Capability
Technical Support
   
   
   
   
   
   
   


Metrology Capability:



In-House Analytical Capability

  • ICP-MS – Surface Metals
  • SPV / uPCD – Lifetime, Bulk Fe
  • SRP (Spreading Resistance Profiling) – Epi Doping profiles & transition width
  • Cleave & Etch – Surface and Bulk Defect delineation.
  • Tencor SP-1, TBI – Laser surface inspection.
  • ADE 9800 – Dimensional & resistivity (E2 flatness capability)
  • Microscope with Nomarksi DIC
  • Epi Layer Thickness and Resistivity Metrology (CV, 4PP, FT-IR)
  • Advanced FTIR – Epi Thickness, Substrate Resistivity, Transition Width measurements
  • Optical Comparator – Edge Profile measurements
  • Auto-Titration – Cleanline Bath Monitoring

 

     © 2017 GlobitTech, Inc. - All Rights Reserved